Special issue. Micromachine. Distributed Control for Micromachine.
نویسندگان
چکیده
منابع مشابه
Micromachine Based Fabric Formation Systems
Commonly used in telecommunication, automotive and biomedical applications, microelectromechanical systems have limited successful commercial applications in other industries. This report briefly reviews MEMS, with a focus on sensors, and their limitations in the textile environment, as well as, outlines four potential projects for MEMS applications in textiles. One application was selected; mo...
متن کاملAn optical probe for micromachine performance analysis
Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. The...
متن کاملRobust Design of an Optical Micromachine for an Ophthalmic Application
This article describes an approach to the robust design of an optical micromachine consisting of a freeform optics, an amplification linkage, and an actuator. The robust design approach consists of monolithic integration principles to minimize assembly efforts and of an optimization of the functional components with respect to robustness against remaining assembly and manufacturing tolerances. ...
متن کاملElectrostatic micromachine scanning mirror for optical coherence tomography.
Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contr...
متن کاملThe influence of coating structure on micromachine stiction
J.G. Kushmerick a, M.G. Hankins b, M.P. de Boer c, P.J. Clews b, R.W. Carpick a,∗ and B.C. Bunker a a Biomolecular Materials and Interfaces 1140, MS 1413, Sandia National Laboratories, Albuquerque, NM 87185, USA b MDL Operations 1746, MS 1084, Sandia National Laboratories, Albuquerque, NM 87185, USA c Intelligent Micromachining 1749, MS 1080, Sandia National Laboratories, Albuquerque, NM 87185,...
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ژورنال
عنوان ژورنال: Journal of the Robotics Society of Japan
سال: 1994
ISSN: 0289-1824,1884-7145
DOI: 10.7210/jrsj.12.531